Please make sure you do not use Remote Desktop to install the Device Pack, use VNC or do it on the server console. Also make sure there's no CSA running at the time of the install or any anti virus software. Other than that and to check that the file size matches, the only thing I can think of is download the file again or try downloading it on a different PC.
Hope this helps!
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Glad it's not just me! I have the same issue, have tried downloading it on different operating systems, browsers, wget etc. MD5 checksum matches the one on the Cisco download page every time. Install fails with the same error, unpacking it manually with WinRAR on Windows XP also complains the file is corrupt.
Guess we'll have to wait for a new one to appear, or apply all the phone loads separately.
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